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Our MBE systems and components are frequently used for the preparation of SiGe and compound semiconductor devices such as HBTs, MESFETs, HEMTs as well as magnetic-optic devices, photo detectors and quantum cascade lasers, vertical surface emitting (VCSEL) and ridge waveguide laser diodes. Spintronic devices, single electron transistors, quantum dot lasers and spin transistors are subject to ongoing research. | Processed GaAs Epi-Wafer |
OCTOPLUS 400 | OCTOPLUS 500 | OCTOPLUS 600 | |
Rapid Thermal Annealing System | OCTOPLUS 500 EBV | OCTOPLUS 600 EBV |
Substrate Manipulation | Effusion Cells | Doping Cells |
Valved Sources | E-Beam Evaporators | Hydrogen Atom Beam Source HABS |
MC-Simulation of MBE and other deposition |